DETECTION APPARATUS FOR SIMULTANEOUS ACQUISITION OF MULTIPLE DIVERSE IMAGES OF AN OBJECT
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United States of America
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Issued Date -
Dec 5, 2024
app pub date -
Aug 13, 2024
filing date -
Aug 13, 2024
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Abstract
Disclosed is a detection apparatus for simultaneous acquisition of multiple images of an object at a plurality of different focus levels; comprising: a modulator for obtaining multiple beam copies of an incoming beam; and a detector operable to capture said multiple beam copies, such that at two of said multiple beam copies are captured at different focus levels. Also disclosed is an inspection apparatus comprising such a detection system.
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