THERMO-MECHANICAL ACTUATOR

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20240402621A1
SERIAL NO

18803195

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Disclosed is a thermo-mechanical actuator comprising a piezo-electric module, the piezo-electric module comprising at least one piezo-electric element, wherein the thermo-mechanical actuator is configured to receive a thermal actuation signal for controlling a thermal behaviour of the piezo-electric module, or provide a thermal sensing signal representative of a thermal state of the piezo-electric module. The thermo-mechanical actuator is configured to receive a mechanical actuation signal for controlling a mechanical behaviour of the piezo-electric module, or provide a mechanical sensing signal representative of a mechanical state of the piezo-electric module. And wherein the thermal actuation signal is configured to create a heat flux within the piezo-electric module and wherein the mechanical actuation signal is configured to deform the piezo-electric module.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
BOS, Koen Martin Willem Jan Eindhoven, NL 3 0
JANSEN, Bas Den Bosch, NL 10 3
VERMEULEN, Johannes Petrus Martinus Bernardus Leende, NL 81 430

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