ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM, PATTERN FORMING METHOD, METHOD FOR PRODUCING ELECTRONIC DEVICE, AND COMPOUND

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20240402601A1
SERIAL NO

18798237

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Abstract

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An actinic ray-sensitive or radiation-sensitive resin composition comprising a compound (Q) represented by a formula (I-1) below and a resin having a polarity that increases through decomposition by an action of an acid,

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Patent Owner(s)

Patent OwnerAddress
FUJIFILM CORPORATION26-30 NISHIAZABU 2-CHOME MINATO-KU TOKYO 106-8620

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujimaki, Nishiki Haibara-gun, JP 2 0
Goto, Akiyoshi Haibara-gun, JP 100 234
Hiura, Nobuhiro Haibara-gun, JP 2 0
Kojima, Masafumi Haibara-gun, JP 48 75
Marumo, Kazuhiro Haibara-gun, JP 16 11
Mori, Takahiro Haibara-gun, JP 271 3230
Shirakawa, Michihiro Haibara-gun, JP 102 248
UEMURA, Minoru Haibara-gun, JP 23 123

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