SCANNING PROBE MICROSCOPE AND PROGRAM
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United States of America
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Issued Date -
Dec 5, 2024
app pub date -
Mar 23, 2022
filing date -
Mar 23, 2022
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Abstract
A scanning probe microscope according to one aspect of the present disclosure divides an observation target region of a sample into a plurality of regions, and drives a scanner to scan the surface of the sample for each region. The data processing unit acquires image data corresponding to the respective regions in the plurality of regions. The input means accepts a user input regarding the acquisition conditions for the plurality of pieces of image data. The acquisition conditions include scanning conditions of the scanner. When the input means accepts a user input for any two variables out of three variables consisting of a scanning range of the scanner for each image data, a spacing between two adjacent scanning ranges, and a maximum number of fields of view capable of being obtained from a maximum scanning range of the scanner, the data processing unit is configured to calculate a remaining one of the three variables based on the accepted two variables.
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