TEMPERATURE CALIBRATION SYSTEM, INSPECTION APPARATUS, AND TEMPERATURE CALIBRATION METHOD
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United States of America
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Issued Date -
Dec 5, 2024
app pub date -
Sep 15, 2022
filing date -
Sep 15, 2022
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Abstract
A temperature calibration system includes: an inspection apparatus to adjust temperature of an inspection target in a placement part and inspect the inspection target; and a surface thermometer, and is configured to calibrate temperature sensors in the placement part. The inspection apparatus includes: a carriage to move the placement part in X-, Y-, and Z-axis directions; and a controller to perform a calibration process to measurement values of the temperature sensors. The surface thermometer is configured to contact a placement surface of the placement part and detect a surface temperature of the placement surface. The controller is configured to: control the carriage to contact the surface thermometer with a detection position of the placement surface of the placement part; detect the surface temperature of the detection position by the surface thermometer; and calibrate the measurement value of the temperature sensor corresponding to the detection position based on the surface temperature.
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