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Abstract

A temperature detector capable of detecting temperature of a semiconductor wafer with high accuracy is provided. In standardizing a spectrum of light measured by a photodetector, a controller uses as a local minimum wavelength a wavelength corresponding to bandgap energy of a semiconductor at absolute zero to set as a local minimum value a minimum value of a light intensity in a wavelength region shorter than the local minimum wavelength, uses as a first maximum wavelength a wavelength corresponding to a difference between bandgap energy and thermal energy of a semiconductor at the highest temperature assumed as a temperature measurement range to set as a local maximum value a value obtained by taking a difference with a local minimum value from the maximum value of the light intensity in a wavelength region shorter than the first maximum wavelength, and performs a difference processing with the local minimum value with respect to the spectrum of the measured light to divide it by the local maximum value, thereby standardizing it.

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First Claim