INERTIAL SENSOR
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Dec 5, 2024
app pub date -
May 9, 2024
filing date -
May 9, 2024
priority date (Note) -
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Abstract
An inertial sensor includes a resonator, a mounting board, and an actuator. The resonator has a first drive mode and a second drive mode. The mounting board has a plurality of electrode portions arranged at a distance from each other and surrounding the resonator. The actuator is configured to vibrate in a z-axis direction. The z-axis direction is a direction orthogonal to a planar direction of the mounting board. The actuator is further configured to vibrate the resonator in the z-axis direction to cause a resonance mode.
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