EROSION RESISTANT METAL FLUORIDE COATINGS DEPOSITED BY ATOMIC LAYER DEPOSITION

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20240401197A1
SERIAL NO

18802354

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Abstract

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Embodiments of the present disclosure relate to articles, coated articles and methods of coating such articles with a rare earth metal containing fluoride coating. The coating can contain at least a first metal (e.g., a rare earth metal, tantalum, zirconium, etc.) and a second metal that have been co-deposited onto a surface of the article. The coating can include a homogenous mixture of the first metal and the second metal and does not contain mechanical segregation between layers in the coating.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Rice, Michael R Pleasanton, US 176 3831
Sun, Jennifer Y Mountain View, US 261 13472
WU, Xiaowei San Jose, US 87 1823

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