Device and Method for Adapting Measuring Range and Sensitivity of Micromechanical Sensors

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20240400379A1
SERIAL NO

18680386

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Abstract

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A measuring system based on micromechanical elements, including an energy converter which is configured to convert a physical signal into a displacement of the energy converter, a force generator which is configured to convert the displacement from the energy converter into a force on a movably mounted slider, and an electrostatic actuator which is mechanically connected to the slider and/or an electrostatic anti-spring which is mechanically connected to the slider, and an electromechanical signal converter which converts a displacement of the slider into an electrical signal, the electrostatic actuator being configured to convert the displacement from the energy converter into a force on a movably mounted slider, which is mechanically connected to the slider, and an electromechanical signal converter which converts a displacement of the slider into an electrical signal, wherein the electrostatic actuator is configured to set an offset compensation of the measuring system via a control voltage and/or the electrostatic anti-spring is configured to set a sensitivity of the measuring system via a control voltage.

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Patent Owner(s)

Patent OwnerAddress
RUHR-UNIVERSITAT BOCHUMUNIVERSITÄTSSTRASSE 150 BOCHUM 44801

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hoffmann, Martin Bochum, DE 106 575
Schmitt, Philip Bochum, DE 4 43

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