OPTICAL MODULE FOR EXTREME ULTRAVIOLET LIGHT SOURCE
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United States of America
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Issued Date -
Nov 28, 2024
app pub date -
Sep 1, 2022
filing date -
Sep 1, 2022
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Abstract
An optical module is configured to pass an optical beam. The optical module includes: a plurality of lenses through which the optical beam passes, the plurality of lenses including at least one aspheric toroid lens; and an optical mount apparatus in which the plurality of lenses is mounted. The plurality of lenses is placed relative to a linearly focused curtain of the optical beam, the linearly focused curtain intersecting a region of interest. The optical mount apparatus is arranged in or fixed to a wall of a chamber of an extreme ultraviolet (EUV) light source such that an optical path is defined that passes through the EUV light source chamber and intersects the region of interest inside the chamber.
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