DISCHARGE ELECTRODE, METHOD OF MANUFACTURING DISCHARGE ELECTRODE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
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United States of America
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Issued Date -
Nov 28, 2024
app pub date -
Aug 7, 2024
filing date -
Aug 7, 2024
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Abstract
A discharge electrode according to an aspect of the present disclosure is for use in a gas laser apparatus that excites a laser gas containing fluorine by discharge, and includes a cathode electrode that extends in one direction, and an anode electrode that extends in the one direction and that is disposed facing the cathode electrode in a discharge direction orthogonal to the one direction. At least one of the cathode electrode and the anode electrode includes an electrode substrate containing a metal, and a dielectric including a first layer having voids provided on a pair of side faces of the electrode substrate. A porosity of the first layer is in a range of 0.5% to 25%.
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