METHOD OF MAKING SEMICONDUCTOR DEVICE
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United States of America
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Nov 28, 2024
app pub date -
Jul 31, 2024
filing date -
Jul 31, 2024
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Abstract
A method of making a semiconductor device includes forming a first device on a first side of a substrate, wherein the first device comprises a first source/drain (S/D) electrode. The method further includes forming a second device on a second side of the substrate, wherein the second side of the substrate is opposite the first side of the substrate, and the second device comprises a second S/D electrode. The method further includes forming a through substrate via (TSV) electrically connecting the first S/D electrode to the second S/D electrode, wherein a width of the TSV is equal to a width of at least one of the first S/D electrode or the second S/D electrode.
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