TOOL AND PROCESSES FOR PICK-AND-PLACE ASSEMBLY
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United States of America
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Issued Date -
Nov 28, 2024
app pub date -
Sep 30, 2022
filing date -
Sep 30, 2022
priority date (Note) -
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Abstract
A system for assembling a first substrate to a second substrate. One or more deformable substrate chucks are utilized to match a topography of a bonding surface on the first substrate to a topography of a bonding surface on the second substrate, where a volatile lubricant is utilized during an alignment step.
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