METHOD FOR REDUCING CHARGE AND ION OPTICAL SYSTEM
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United States of America
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Issued Date -
Nov 28, 2024
app pub date -
May 22, 2024
filing date -
May 22, 2024
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Abstract
Methods for reducing charge on a contaminated surface of an ion optical system having a layer of charged contaminant thereon comprise generating charged particles by exciting a radiation source that is distinct from the contaminated surface and neutralising at least a portion of the layer of charged contaminant by causing the charged particles to interact with the layer of charged contaminant. The radiation source comprises an electromagnetic radiation source that emits electromagnetic radiation, and generating the charged particles comprises causing the electromagnetic radiation to interact with the layer of charged contaminant and/or the ion optical system to generate the charged particles; and/or (ii) the radiation source comprises an electron source that emits free electrons. Ion optical systems are configured to reduce charge on a contaminated surface of the ion optical system.
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