DATA CALCULATION METHOD AND SUBSTRATE PROCESSING DEVICE
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United States of America
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Issued Date -
Nov 28, 2024
app pub date -
Aug 2, 2024
filing date -
Aug 2, 2024
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Abstract
A data calculation method includes: acquiring a first data group for a predetermined period; dividing the first data group into a plurality of groups according to a range of each data value included in the first data group; extracting a second data group included in a valid group among the plurality of groups; and outputting a statistical value for each of the plurality of groups based on the second data group.
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