REMOVING METHOD, REMOVAL APPARATUS, IMPRINT APPARATUS, REPLICA MANUFACTURING APPARATUS, AND ARTICLE MANUFACTURING METHOD
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United States of America
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Issued Date -
Nov 28, 2024
app pub date -
Apr 18, 2024
filing date -
Apr 18, 2024
priority date (Note) -
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status (Latency Note)
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Abstract
A removing method that makes it possible to remove a residual generated at least near a side surface of a convex portion of a mold. The removing method is a removing method of removing a residual attached to a mold which includes a base having a main surface and a convex portion provided on the main surface and in which a concavo-convex pattern formed on an upper surface of the convex portion is pressed against a curable composition, the removing method includes removing the residual, and the removing of the residual includes removing the residual by dissolving a liquid-repellent layer formed on at least a side surface of the convex portion with a predetermined solvent.
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