ACTIVE DITHER BALANCING OF A MOTION STAGE FOR SCANNING PROBE MICROSCOPY
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United States of America
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Issued Date -
Nov 28, 2024
app pub date -
Sep 30, 2022
filing date -
Sep 30, 2022
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Abstract
The present disclosure concerns a z-position motion stage for use in a scanning probe microscopy system, a scanning probe microscopy system, and a method of operating the motion stage. The motion stage (1) comprises, a scanner body (10) and a driving dither (30) for driving a cantilever (51) of a probe (50) associated to the driving dither in an oscillating motion (31). The stage further comprises at least a first force balancing means (60), that acts onto the scanner body at a position opposite the driving dither (30) across a neutral center (N) of the motion stage (1), wherein the force balancing means (60) comprises at least a first balance dither (61) configured to oscillate in harmony with the driving dither.
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