INERTIAL SENSOR MODULE, INERTIAL MEASUREMENT UNIT, AND ELECTRONIC APPARATUS
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United States of America
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Issued Date -
Nov 28, 2024
app pub date -
May 24, 2024
filing date -
May 24, 2024
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Abstract
An inertial sensor module includes a first inertial sensor that detects a physical quantity of a first axis, a second inertial sensor that detects the physical quantity of the first axis, a substrate includes a first region in which the first inertial sensor and the second inertial sensor are mounted, a second region surrounding the first region, and a plurality of slits provided between the first region and the second region to surround the first region.
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