HIGH THROUGHPUT 3D X-RAY IMAGING SYSTEM USING A TRANSMISSION X-RAY SOURCE
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United States of America
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Nov 28, 2024
app pub date -
Aug 2, 2024
filing date -
Aug 2, 2024
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Abstract
An x-ray imaging system includes at least one detector and an x-ray source including an x-ray transmissive vacuum window. The x-ray source is configured to produce diverging x-rays emerging from the vacuum window and propagating along an x-ray propagation axis extending through a region of interest of an object to the at least one detector. The diverging x-rays have propagation paths within an angular divergence angle greater than 1 degree centered on the x-ray propagation axis. The system further includes at least one first motion stage configured to rotate the object about a rotation axis. The system further includes at least one second motion stage configured to move the x-ray source and the at least one detector relative to the object to switch between a laminography configuration and a tomography configuration.
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