SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
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United States of America
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Issued Date -
Nov 21, 2024
app pub date -
Apr 19, 2024
filing date -
Apr 19, 2024
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Abstract
A semiconductor structure including the following components is provided. Stack structures are located on a substrate and separated from each other. Isolation layers are located on the sidewalls of the stack structures. A contact is located on the substrate between two adjacent isolation layers. A landing pad is located on the contact. The landing pad is located on one of the two adjacent isolation layers. There is an opening on one side of the landing pad. A first dielectric layer is located in the opening. A porous dielectric layer is located between the first dielectric layer and the landing pad. The top surface of the porous dielectric layer is lower than the top surface of the landing pad and the top surface of the first dielectric layer to form a recess between the landing pad and the first dielectric layer. The recess exposes the sidewall of the landing pad.
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