Importance

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Abstract

A semiconductor structure includes a memory die and a logic die. The memory die includes a three-dimensional memory device that contains an alternating stack of insulating layers and electrically conductive layers, memory openings vertically extending through the alternating stack, and memory opening fill structures located in the two-dimensional array of memory openings, where each of the memory opening fill structures includes a respective vertical semiconductor channel, a respective drain region, and a vertical stack of memory elements located at levels of the electrically conductive layers, memory-side bonding pads, and a first peripheral circuit including first thin film transistors located between the three-dimensional memory device and the memory-side bonding pads. The logic die includes a logic-side substrate, logic-side bonding pads bonded to the memory-side bonding pads, and a second peripheral circuit located between the logic-side substrate and the logic-side bonding pads.

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First Claim