CLAMP RING AND METHOD OF USING CLAMP RING

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20240387233A1
SERIAL NO

18786382

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A clamp ring including an inner periphery of increased diameter at locations where inwardly extending tabs are not located reduces the risk a workpiece that is placed in close proximity to the clamp ring or which contacts the clamp ring during processing will stick to the clamp ring.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MFG CO LTDNO 8 LI-HSIN RD 6 SCIENCE-BASED INDUSTRIAL PARK HSIN-CHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
CHI, Yuan-Hsin Hsinchu, TW 25 3
CHOU, Chih-Wei Hsinchu, TW 21 21
CHOU, Yin-Tun Hsinchu, TW 20 4
LIU, Yu-Chi Hsinchu, TW 16 2
WANG, Chih-Ming Hsinchu, TW 123 844
WANG, Hung-Chih Hsinchu, TW 40 148

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