SUBSTRATE PROCESSING SYSTEM, LOAD DEVICE AND METHOD
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United States of America
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Issued Date -
Nov 21, 2024
app pub date -
Jul 30, 2024
filing date -
Jul 30, 2024
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Abstract
A system includes at least one sensor and at least one controller. The at least one sensor is configured to generate a first weight signal corresponding to a first weight of a first lot of substrates, and a second weight signal corresponding to a second weight of a second lot of substrates. The at least one controller is coupled to the at least one sensor to receive the first weight signal and the second weight signal. The at least one controller is configured to, based on a weight difference between the first weight and the second weight, control a processing apparatus to rotate the first lot of substrates and the second lot of substrates simultaneously.
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