CIRCUIT DESIGN AND MANUFACTURING HOTSPOT ROOT CAUSE EXTRACTION
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United States of America
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Issued Date -
Nov 21, 2024
app pub date -
Sep 28, 2023
filing date -
Sep 28, 2023
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Abstract
Various aspects of the present disclosed technology relate to techniques for hotspot root cause determination. Feature values for a plurality of design/process-related features for each of the layout regions of interest on a layout design are determined. Population ratios for feature value ranges for each of the plurality of design/process-related features are determined based on a number of layout regions of interest having feature values within each of the feature value ranges. Hotspot feature repeater values are determined. Based on the population ratios and the hotspot feature repeater values, a root cause analysis can be performed to determine one or more design/process-related features that are most likely causes for each of a plurality of hotspot layout regions. The information of the one or more design/process-related features can be used to identity other hotspot regions and adjust the layout design or to adjust a manufacturing process.
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