MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES
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United States of America
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Nov 21, 2024
app pub date -
Jul 26, 2024
filing date -
Jul 26, 2024
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Abstract
An apparatus for manufacturing semiconductors includes a power amplifier to power a laser, a catalyst disposed in the power amplifier, an inlet port, and an exhaust port. The inlet port introduces a mixing gas to an interior of the power amplifier during a cleaning operation so that the mixing gas contacts a surface of the catalyst having a build-up thereon. The mixing gas reacts with and removes the build-up by generating gaseous by-products. The exhaust port removes the gaseous by-products from the power amplifier.
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