SENSOR
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United States of America
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Issued Date -
Nov 21, 2024
app pub date -
Jul 31, 2024
filing date -
Jul 31, 2024
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Abstract
A sensor that includes: a piezoelectric film; a first electrode arranged above the piezoelectric film, and overlapping at least a part of the piezoelectric film; a second electrode arranged below the piezoelectric film, and overlapping at least a part of the piezoelectric film; and an insulator layer arranged above the first electrode, and overlapping at least a part of the first electrode, in which at least a part of an outer edge of the insulator layer does not overlap the first electrode, and is located below an upper principal surface of the first electrode.
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