MICROELECTROMECHANICAL DEVICE AND METHOD FOR MAKING THE SAME
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United States of America
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Issued Date -
Nov 21, 2024
app pub date -
May 16, 2023
filing date -
May 16, 2023
priority date (Note) -
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Abstract
A microdevice including a first pedestal, a second pedestal parallel to the first pedestal, the second pedestal comprising a first protrusion on its top surface. The device also including a conformal dielectric layer and a metal structure formed over a portion of the conformal dielectric layer. The metal structure including a first portion surrounding the first protrusion, a second portion parallel to the top surface of the polysilicon pedestal, and a third portion connecting the first portion and the second portion.
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