TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR
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United States of America
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Issued Date -
Nov 14, 2024
app pub date -
Jul 24, 2024
filing date -
Jul 24, 2024
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Abstract
An acoustic resonator is provided that includes a piezoelectric plate and an interdigital transducer (IDT) including interleaved fingers on the piezoelectric plate. The piezoelectric plate and the IDT are configured such that a radio frequency signal applied to the IDT excites a shear primary acoustic mode within the piezoelectric plate. The acoustic resonator further includes a front-side dielectric layer on the piezoelectric plate between the fingers of the IDT, wherein a resonance frequency of the acoustic resonator device has an inverse dependence on a thickness of the front-side dielectric layer.
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