CONDUCTIVE CONTACT HAVING BARRIER LAYERS WITH DIFFERENT DEPTHS

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United States of America

APP PUB NO 20240379557A1
SERIAL NO

18782167

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Abstract

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A semiconductor device includes a transistor having a source/drain and a gate. The semiconductor device also includes a conductive contact for the transistor. The conductive contact provides electrical connectivity to the source/drain or the gate of the transistor. The conductive contact includes a plurality of barrier layers. The barrier layers have different depths from one another.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTDNO 8 LI-HSIN RD 6 SCIENCE BASED INDUSTRIAL PARK HSINCHU 300

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
JangJian, Shiu-Ko Tainan City, TW 172 1310
Wang, Ting-Chun Tainan City, TW 91 665
Wu, Chia-Yang Tainan City, TW 21 57
Yu, Yung-Si Tainan, TW 9 16

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