MASK AND METHOD OF FORMING THE SAME

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United States of America

APP PUB NO 20240377722A1
SERIAL NO

18779098

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Abstract

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A mask includes a reflective layer, an absorption layer, a buffer layer and an absorption part. The absorption layer is disposed over the reflective layer. The buffer layer is disposed between the reflective layer and the absorption layer. The absorption part is disposed in the reflective layer, the buffer layer and the absorption layer.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Chun-Lang Tainan City, TW 55 312
Chen, Jheng-Yuan Hsinchu, TW 5 5
Tu, Chih-Chiang Tauyen, TW 85 480
Yang, Shih-Hao Tainan City, TW 14 20

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