OPTICAL DEVICES AND METHODS OF MANUFACTURE

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United States of America

APP PUB NO 20240377662A1
SERIAL NO

18415092

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Abstract

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An optical device and methods of manufacturing such optical devices are presented. In embodiments the optical device is a tunable beam splitter which is made by forming a first dopant region over a substrate, the first dopant region comprising a first waveguide and a second waveguide, depositing a cladding material over the first waveguide and the second waveguide, and forming a second dopant region overlying the first waveguide and the second waveguide, wherein the forming the second dopant region comprises forming a first region extending over both the first waveguide and the second waveguide, the first region having a constant concentration of a first dopant.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hsia, Hsing-Kuo Jhubei City, TW 122 756
Lee, Ming Taipei City, TW 49 598
Lin, Wei-Heng Taipei City, TW 12 122
Shen, Tien-Lin Taipei City, TW 3 0
Yu, Chen-Hua Hsinchu, TW 2207 47923

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