MEDIA-RESISTANT PRESSURE SENSOR FOR LARGE PRESSURE RANGES
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United States of America
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Nov 14, 2024
app pub date -
Jul 24, 2024
filing date -
Jul 24, 2024
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Abstract
In some embodiments, a pressure sensor comprises may comprise a housing, a flexible membrane which, together with the housing, forms a hermetically closed cavity, a sensor element arranged in the hermetically closed cavity, and a gaseous medium in the hermetically closed cavity. The sensor may measure an external pressure on the flexible membrane based on at least one of: a pressure of a gas in the hermetically closed cavity, and/or an amount of time of a time of flight of an optical pulse or a sound pulse emitted by the sensor element reflected from the flexible membrane.
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