DUAL CHILLER SYSTEM
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Nov 14, 2024
app pub date -
Mar 25, 2024
filing date -
Mar 25, 2024
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Abstract
A dual chiller system includes a high-temperature tank configured to supply a first coolant of a first temperature to the outside, a low-temperature tank configured to supply a second coolant of a second temperature lower than the first temperature to the outside, a first automatic inlet valve and a second automatic inlet valve respectively connected to the high-temperature tank and the low-temperature, a first substrate processing device configured to receive the first coolant or the second coolant from the first automatic inlet valve and a second substrate processing device configured to receive the first coolant or the second coolant from the second automatic inlet valve, a cooling unit and a system controller.
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