SILICA-PASSIVATED ARTICLE AND METHOD FOR FORMING
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United States of America
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Issued Date -
Nov 14, 2024
app pub date -
Jul 22, 2022
filing date -
Jul 22, 2022
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Abstract
A silica-passivated article is disclosed, including a fluidic path, a fluidic path surface facing the fluidic path, and a conformal coating disposed on a passivated portion of the fluidic path surface between the fluidic path surface and the fluidic path such that the fluidic path is maintained remote from the passivated portion of the fluidic path surface across the conformal coating. The conformal coating is a silica-based coating, includes carbon-based moieties each covalently bound to singular silicon atoms of the silica-based coating, is substantially free of carbon-based moieties each covalently bound to more than one silicon atom of the silica-based coating, and is substantially free of layers of bulk silicon. The passivated portion of the fluidic path surface constitutes at least 67% of the fluidic path surface by surface area. A method for forming the silica-passivated article is disclosed including applying silsesquioxane to the fluidic path and curing.
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