Importance

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Abstract

A semiconductor memory device, and a manufacturing method of the semiconductor memory device, includes: a bit line overlapping with a peripheral circuit layer; interlayer insulating layers and conductive patterns alternately stacked in a first direction on the bit line; vertical channels connected to the bit line, the vertical channels penetrating the interlayer insulating layers and the conductive patterns, the vertical channels protruding farther in the first direction than the stacked interlayer insulating layers and the conductive patterns; a connection pattern in contact with a portion of each of the vertical channels that protrudes farther in the first direction than the stacked interlayer insulating layers and the conductive patterns, the connection pattern connecting the vertical channels; a source channel in contact with the connection pattern, the source channel extending in the first direction; and a source select line surrounding the source channel.

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First Claim