CONTACT ELEMENT OF A MEMS RELAY
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United States of America
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Issued Date -
Nov 7, 2024
app pub date -
Jan 9, 2023
filing date -
Jan 9, 2023
priority date (Note) -
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Abstract
A contact element of a MEMS relay. The contact element includes a defined number greater than one of electrically conductive contact bodies, wherein the contact bodies are arranged at least partially within a layer that is plastically deformable in a defined manner, wherein a hardness of the plastically deformable layer is less than a hardness of the contact bodies, wherein, by exerting a compressive force on the contact bodies, the contact bodies can be pressed into the plastically deformable layer and brought to a substantially uniform height level, and wherein the plastically deformable layer is arranged at least partially within an insulation layer.
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