RESIST AUXILIARY FILM COMPOSITION, AND PATTERN FORMING METHOD USING SAID COMPOSITION

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United States of America

APP PUB NO 20240369925A1
SERIAL NO

18291760

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Abstract

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A resist auxiliary film composition includes: (A) a resin; and (B) a solvent containing: (B1) a compound represented by the following general formula (b-1), wherein the content of the active component is 45% by mass or less based on the total amount of the resist auxiliary film composition:

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Patent Owner(s)

Patent OwnerAddress
MITSUBISHI GAS CHEMICAL COMPANY INCTOKYO 100-8324

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ECHIGO, Masatoshi Tokyo, JP 137 625
HOSHINO, Ryosuke Niigata, JP 7 4
KATAGIRI, Masayuki Niigata, JP 106 1995
OKADA, Takumi Niigata, JP 20 91
SATO, Hideyuki Niigata, JP 124 2447
SUZUKI, Shu Kanagawa, JP 10 5

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