RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
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United States of America
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Issued Date -
Nov 7, 2024
app pub date -
Jul 18, 2024
filing date -
Jul 18, 2024
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Abstract
A reticle enclosure includes a base including a first surface, a cover including a second surface and disposed on the base, wherein the base and the cover form an internal space therebetween to include a reticle, and a layer of elastomer or gelatinous material disposed on at least one of the first surface and the second surface, wherein the layer of elastomer or gelatinous material is disposed between the base and the cover and contacts either the base or the cover.
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