HYBRID OPTICAL FIBER MEMS SCANNER
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United States of America
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Issued Date -
Nov 7, 2024
app pub date -
Jul 17, 2024
filing date -
Jul 17, 2024
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Abstract
An optical scanner includes a base region and a cantilevered silicon beam protruding from the base region. The optical scanner also includes a waveguide disposed on the base region and the cantilevered silicon beam and a transducer assembly comprising one or more piezoelectric actuators coupled to the cantilevered silicon beam and configured to induce motion of the cantilevered silicon beam in a scan pattern.
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