DEVICE FOR MEASURING FREQUENCY RESPONSE OF A WAFER
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United States of America
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Issued Date -
Nov 7, 2024
app pub date -
Jul 17, 2024
filing date -
Jul 17, 2024
priority date (Note) -
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Abstract
A device for measuring a frequency response of a wafer is provided. The device includes a first oscillator, a clock generator, a first circuit, and a first driver. The first oscillator configured to provide a first signal having a first frequency. The clock generator is configured to receive the first signal and generate a first clock signal and a second clock signal having the first frequency. The first circuit on the wafer and having a first number of parallelly connected ring oscillators. The first driver is coupled to the first circuit and the clock generator, and configured to receive the first clock signal and the second clock signal, and drive the first circuit. A first portion of each ring oscillator of the first circuit is electrically disconnected from a second portion of each ring oscillator of the first circuit.
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