LIGHTING SYSTEM FOR MULTI-PROBE MICROSCOPE
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United States of America
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Issued Date -
Nov 7, 2024
app pub date -
Jun 10, 2022
filing date -
Jun 10, 2022
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Abstract
A probe microscope comprising a probe array with an array of probes, each probe comprising a cantilever and a probe tip. A lighting system comprises a plurality of light sources. Each light source is configured to output a respective light beam. A lens array comprises an array of lenses. Each source lens is positioned to receive a respective one of the light beams from the lighting system. A collector lens is configured to collect the light beams from the lens array. An objective lens is configured to receive the light beams from the collector lens and focus each light beam onto the cantilever of a respective one of the probes. The lighting system is configured to modulate a power of the light beams to actuate the probes, and the lighting system is configured to modulate the power of some or all of the light beams independently.
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