INSPECTION APPARATUS AND INSPECTION METHOD
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United States of America
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Nov 7, 2024
app pub date -
Jul 18, 2024
filing date -
Jul 18, 2024
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Abstract
An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane, and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector includes a long X-ray receiver.
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