SILICON CHANNEL FOR BONDED 3D NAND DEVICES

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United States of America

APP PUB NO 20240363345A1
SERIAL NO

18441352

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Abstract

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A method for manufacturing a memory device includes depositing a seed layer in a memory hole extending through a memory stack. The seed layer includes particles, such as silicon particles. The seed layer is etched to produce etched particles. The etched particles act as nuclei for the growth of a crystalline channel material in the memory hole.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
CHEN, Hsueh Chung Cohoes, US 18 120
GAIRE, Raman Mechanicville, US 8 0
JUNG, In Soo Campbell, US 57 1246
KANG, Chang Seok San Jose, US 58 271
LAZKANI, Houssam Schenectady, US 6 0
PRANATHARTHIHARAN, Balasubramanian Santa Clara, US 254 1402

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