METHODS AND SYSTEMS FOR COOLING PLASMA TREATMENT COMPONENTS
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United States of America
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Oct 31, 2024
app pub date -
Jul 10, 2024
filing date -
Jul 10, 2024
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Abstract
Methods and systems for uniformly cooling a dome within a plasma treatment system are disclosed. The methods and systems utilize a diffuser including a perforated plate and a cone. The perforated plate includes a center portion and multiple arrays of holes with each array being located circumferentially at a different distance from the center. The cone extends away from the center. The diffuser spreads cooling gas more uniformly across the surface of the dome.
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