METHOD FOR DETECTING CONTACT FORCE OF PROBE CARD
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Oct 31, 2024
app pub date -
Jul 8, 2024
filing date -
Jul 8, 2024
priority date (Note) -
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Abstract
A method for detecting a contact force of a probe card is provided. The method includes contacting a pressure film sensor with a plurality of needles over a lower surface of the probe card. The method includes detecting the contact force of the probe card via the pressure film sensor. The method also includes adjusting a position of a push base over an upper surface of the probe card based on the detected contact force of the pressure film sensor.
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