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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
ICSPI CORP	248 CORRIE CRESCENT WATERLOO ONTARIO N2L 6E1

International Classification(s)

• G01Q:SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIO....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
CAO, Zhenle	Kitchener, CA	1	0
MORRIS, David	Kitchener, CA	64	771
OLFAT, Mahdi	Kitchener, CA	4	12

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	Apr 30, 2028
7.5 Year Payment	$3600.00	$1800.00	$900.00	Apr 30, 2032
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Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
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Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2024/0361,351

METHODS FOR FEEDBACK DETECTION OF A MEMS ARRAY

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