METHOD AND APPARATUS FOR REAL TIME OPTIMIZATION OF A MICROWAVE PLASMA
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United States of America Patent
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Issued Date -
Oct 24, 2024
app pub date -
Aug 17, 2022
filing date -
Aug 17, 2022
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Abstract
A method of real time optimization of a microwave plasma includes adjusting in real time an injection angle of a swirl gas flow of the microwave plasma, the magnitude of the swirl gas flow of the microwave plasma, or the microwave power applied to the microwave plasma.
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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6K INC | 25 COMMERCE WAY NORTH ANDOVER MA 01845 01845 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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KOZLOWSKI, Michael | Reading, US | 20 | 182 |
# of filed Patents : 20 Total Citations : 182 | |||
SHANG, Zongren | Westborough, US | 11 | 25 |
# of filed Patents : 11 Total Citations : 25 |
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