VAPORIZER
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United States of America Patent
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Issued Date -
Oct 24, 2024
app pub date -
Aug 31, 2022
filing date -
Aug 31, 2022
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Abstract
This vaporizer comprises: a vaporizing unit for vaporizing a precursor to generate a material gas; a gas flow passageway for guiding the generated material gas to the outside of the vaporizing unit; a first heater for heating the vaporizing unit but not heating the gas flow passageway; and a second heater for heating both the vaporizing unit and the gas flow passageway. In variations, one of the first heater and the second heater has a planar shape, and include a portion having a large power consumption and a portion having a small power consumption per unit area.
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