CARRIER DECHUCKING SYSTEM AND CARRIER DECHUCKING METHOD USING CARRIER DECHUCKING SYSTEM
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United States of America Patent
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Issued Date -
Oct 17, 2024
app pub date -
Dec 15, 2023
filing date -
Dec 15, 2023
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Abstract
A carrier dechucking system includes a work carrier including a substrate having a first surface, an opposite second surface with a support film attached, and a ring frame surrounding the substrate. The work carrier is placed on a placement table having a support surface on which a lower surface of the support film is maintained, lifting pins configured to move the work carrier, an ionizer configured to eject ions to the lower surface, and a controller. The controller is configured to control the lifting pins to move the work carrier from the support surface to first and second levels, and to control the ionizer to remove static electricity charged on the support film from the support surface to the first level. At the first level, a surface voltage of the first surface of the substrate is lower than a surface voltage of the lower surface of the support film.
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