PLANARIZATION APPARATUS, PLANARIZATION METHOD, AND PRODUCT MANUFACTURING METHOD
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United States of America Patent
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Issued Date -
Oct 17, 2024
app pub date -
Apr 11, 2024
filing date -
Apr 11, 2024
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Abstract
Whether to perform planarization processing is determined by projecting a pressing member in a state where a planarization member held by a member holding unit is not in contact with a composition on a substrate held by a substrate holding unit. Determining whether to perform the planarization processing in such a manner enables the planarization member used to planarize the composition on the substrate to be stably separated.
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